Blank Cover Image

Microstructure and Stress Analyses of Copper Films Deposited on Biased Substrates by Microwave Plasma-Assisted Sputtering

著者名:
掲載資料名:
Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
750
発行年:
2003
開始ページ:
343
終了ページ:
348
総ページ数:
6
出版情報:
Warrendale, Penn: Materials Research Society
ISSN:
02729172
ISBN:
9781558996878 [1558996877]
言語:
英語
請求記号:
M23500/750
資料種別:
国際会議録

類似資料:

1 国際会議録 Characterization and Tribological Properties of Nanostructured Copper/Carbon Composite Films Prepared by Microwave Plasma-Assisted Dual Deposition Processes

Thiery, Francois, Pauleau, Yves, Pelletier, Jacques, Grob, Jean-Jacques

Materials Research Society
7 国際会議録 Structure,Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation

Dumas,L., Robic,J.-Y., Pauleau,Y.

Trans Tech Publications
2 国際会議録 Changes in Stress and Microstructure in Sputter Deposited Copper Films Due to Substrate Surface Effects

Okolo, B., Lamparter, P., Welzel, U., Wagner, T., Mittemeijer, E.J.

Trans Tech Publications
8 国際会議録 DEPOSITION FUNDAMENTALS AND PROPERTIES OF METALLIC AND DIFFUSION BARRIER FILMS

Pauleau Y.

Kluwer Academic Publishers
3 国際会議録 Correlations Between the Substrate Temperature, Properties and Tribological Performance of Sputter-Deposited Amorphous Carbon Films

Mounler, E., Juliet, P., Quesnel, E., Pauleau, Y., Dubus, M.

Materials Research Society
9 国際会議録 Microstructure and Mechanical Properties of DBC on Sputter Deposited Copper on Alumina Substrate

Lee, C.H., Lee, Y.S., Cho, D.C.

Trans Tech Publications
4 国際会議録 Microstructure and Stress in Mo Films Sputter-Deposited on Glass Substrates

Lee, Tsang-Shaw, Gu, Gin-Lern, Tseng, Bae-Heng

MRS - Materials Research Society
10 国際会議録 REACTION MECHANISMS IN LASER-ASSISTED CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES

Pauleau, Y., Tonneau, D.

Kluwer Academic Publishers
5 国際会議録 Residual stress,composition,and optical properties of SiOxNy thin films deposited by dual ion beam sputtering

Robic,J.Y., Leplan,H., Berger,M., Chaton,P., Quesnel,E., Lartigue,O., Pelle,C., Pauleau,Y., Pierre,F.

SPIE-The International Society for Optical Engineering
11 国際会議録 Substrate Bias Dependent Microstructure and Properties of TC17 Titanium Alloy Coatings Deposited by Magnetron Sputtering

M. Wu, H. Huang, H. Li, K. Zhang, M. Wen, W.T. Zheng

Trans Tech Publications
6 国際会議録 Structure and Mechanical Properties of Nanostructured Metal-Carbon Films

Pauleau, Y., Thiery, F., Pelletier, J., Uglov, V.V., Kuleshov, A.K., Dub, S.N., Samtsov, M.P.

Kluwer Academic Publishers
12 国際会議録 Stress, Microstructure And Temperature Stability Of Reactive Sputter Deposited WNx Thin Films

Leedy, K.D., O'Keefe, M.J., Wilson, J.G., Osterday, R., Grant, J.T.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12