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Properties of Molybdenum Nitride Thin Film Deposited by Reactive Sputter Deposition

著者名:
掲載資料名:
Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
750
発行年:
2003
開始ページ:
307
終了ページ:
312
総ページ数:
6
出版情報:
Warrendale, Penn: Materials Research Society
ISSN:
02729172
ISBN:
9781558996878 [1558996877]
言語:
英語
請求記号:
M23500/750
資料種別:
国際会議録

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