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Room Temperature Grain Growth in Sputtered Cu Films

著者名:
Deduytsche, D.
Detavernier, C.
Debaerdemaeker, J.
Van Meirhaeghe, R.L.
Dauwe, C.
Kuan, T.S.
さらに 1 件
掲載資料名:
Morphological and compositional evolution of thin films : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
749
発行年:
2003
開始ページ:
207
終了ページ:
212
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996861 [1558996869]
言語:
英語
請求記号:
M23500/749
資料種別:
国際会議録

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