Ferroelectric Properties of 15-20 nm-Thick PZT Ultrathin Films Prepared by MOCVD

Ferroelectric Properties of 15-20 nm-Thick PZT Ultrathin Films Prepared by MOCVD

著者名:

掲載資料名:

Ferroelectric thin films XI : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

748

発行年:

2003

開始ページ:

81

終了ページ:

86

総ページ数:

6

出版情報:

Warrendale, Pa: Materials Research Society

ISSN:

02729172

ISBN:

9781558996854 [1558996850]

言語:

英語

請求記号:

M23500/748

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014408
シリーズID:	PA00000011
会議名:	Symposium on ferroelectric thin films
回次:	11th
会議開催地:	Boston, MA, USA
会議開催年:	2002.12.02-2002.12.05

類似資料:

1 国際会議録 Thickness dependence and electrical properties of Ultrathin PZT films grown on SrRuO3/SrTiO3 by MOCVD Shimizu, M., Fujisawa, H., Niu, H. MRS-Materials Research Society	7 国際会議録 Control of Grain Size of Pb(Zr,Ti)O3 Thin Films by MOCVD and the Effect of Size on the Electrical Properties Fujisawa, H., Nakashima, S., Shimizu, M., Niu, H. MRS - Materials Research Society
2 国際会議録 MOCVD of Ir and IrO2 Thin Films For PZT Capacitors Shimizu, M., Kita, K., Fujisawa, H., Niu, H. Materials Research Society	8 国際会議録 Step Coverage of Pb(Zr,Ti)O3 Thin Films Grown by MOCVD Shimizu, M., Hyodo, S., Fujisawa, H., Niu, H., Shiosaki, T. MRS - Materials Research Society
3 国際会議録 Ir Thin Films for PZT Capacitors Prepared by MOCVD Using a New Ir Precursor Fujisawa, H., Watari, S., Shimizu, M., Niu, H., Oshima, N. Materials Research Society	9 国際会議録 Piezoresponse Measurements for Pb(Zr,Ti)O3 Island Structure Using Scanning Probe Microscopy Fujisawa, H., Morimoto, K., Shimizu, M., Niu, H., Honda, K., Ohtani, S. Materials Research Society
4 国際会議録 Observation of domain structure at initial growth state of PbTiO3 thin films grown by MOCVD Fujisawa, H., Shimizu, M., Niu, H., Honda, K., Ohtani, S. MRS-Materials Research Society	10 国際会議録 FERROELECTRIC THIN FILMS OF BISMUTH TITANNATE PREPARED BY MOCVD Wang, H., Fu, L.W., Yu, S.Q., Wang, X.L., Lu, Z.K., Jiang, M.H. Materials Research Society
5 国際会議録 Effects of Sputtered Ir and IrO2 Electrodes on the Properties of PZT Thin Films Deposited by MOCVD Shimizu, M., Fujisawa, H., Hyodo, S., Nakashima, S., Niu, H., Okino, H., Shiosaki, T. MRS - Materials Research Society	11 国際会議録 Investigation of Domain Wall Velocity and Nucleation Rate in Polarization Switching of Epitaxial Pb(Zr,Ti)O3 Thin Films Using Piezoresponse Scanning Force … Fujisawa, H., Yagi, T., Shimizu, M., Niu, H. Materials Research Society
6 国際会議録 Effects of the Purity of Metalorganic Sources on the Electrical Properties of Pb(Zr,Ti)O3 Thin Films by MOCVD Shimizu, M., Yoshida, M., Fujisawa, H., Niu, H. MRS - Materials Research Society	12 国際会議録 A Novel Iridium Precursor for MOCVD K. Kawano, T. Furakawa, M. Takamori, K. Tada, T. Yamakawa, N. Oshima, H. Fujisawa, M. Shimizu Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12