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Effect of Al-Content and Post Deposition Annealing on the Electrical Properties of Ultra-Thin HfAlxOy Layers

著者名:
Carter, R.J.
Tsai, W.
Young, E.
Caymax, M.
Maes, J.W.
Chen, P.J.
Delabie, A.
Zhao, C.
Gendt, S.De
Heyns, M.
さらに 5 件
掲載資料名:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
745
発行年:
2003
開始ページ:
35
終了ページ:
40
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
言語:
英語
請求記号:
M23500/745
資料種別:
国際会議録

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