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Hybrid Integration of III-V Optoelectronic Devices on Si Platform Using BCB

著者名:
掲載資料名:
Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
741
発行年:
2003
開始ページ:
123
終了ページ:
128
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996786 [1558996788]
言語:
英語
請求記号:
M23500/741
資料種別:
国際会議録

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