Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications

Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications

著者名:

掲載資料名:

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

741

発行年:

2003

開始ページ:

67

終了ページ:

72

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996786 [1558996788]

言語:

英語

請求記号:

M23500/741

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014401
シリーズID:	PA00000011
会議名:	Symposium on nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines
回次:	2002
会議開催地:	Boston, MA, USA
会議開催年:	2002.12.02-2002.12.04

類似資料:

1 国際会議録 Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices Dunning, J., Fu, X.A., Rajgopal, S., Mehregany, M., Zorman, C.A. Trans Tech Publications	7 国際会議録 Behavior of Polycrystalline SiC and Si Surface-Micronrachined Lateral Resonant Structures at Elevated Temperatures Fleischman,A.J., Roy,S., Zorman,C.A., Mehregany,M. Trans Tech Publications
2 国際会議録 Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD Fleischman,A.J., Wei,X., Zorman,C.A., Mehregany,M. Trans Tech Publications	8 国際会議録 Characterization of LOW Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications Dunning, J., Fu, X.A., Mehregany, M., Zorman, C.A. Trans Tech Publications
3 国際会議録 Silicon carbide micro- and nanoelectromechanical systems Mehregany, M., Zorman, C.A. SPIE - The International Society of Optical Engineering	9 国際会議録 XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon Roy, S., Zorman, C. A., Wu, C. H., Fleischman, A. J., Mehregany, M. MRS - Materials Research Society
4 国際会議録 Advanced Processing Techniques for Silicon Carbide MEMS and NEMS Zorman, C.A., Mehregany, M. Trans Tech Publications	10 国際会議録 Deposition and characterization of in situ boron doped polycrystalline silicon films for microelectromechanical systems applications McMahon, J. J., Melzak, J. M., Zorman, C. A., Chung, J., Mehregany, M. MRS-Materials Research Society
5 国際会議録 Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining Song, X., Rajgopal, S., Melzak, J.M., Zorman, C.A., Mehregany, M. Trans Tech Publications	11 国際会議録 The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process Wu, C.H., Chung, J., Hong, M.H., Zorman, C.A., Pirouz, P., Mehregany, M. Trans Tech Publications
6 国際会議録 Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining Song, X., Rajgopal, S., Melzak, J.M., Zorman, C.A., Mehregany, M. Trans Tech Publications	12 国際会議録 Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition Fu, X.A., Trevino, J., Mehregany, M., Zorman, C.A. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12