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Comparative Study of Near Stochiometric a-SiC:H and a-SiC Films: Effect of the Bonded Hydrogen

著者名:
Vasin, A.V.
Rusavsky, A.V.
Kushnirenko, V.I.
Starik, S.P.
Kutsay, O.M.
Nazarov, A.N.
Lysenko, V.S.
Semenov, A.V.
Puzikov, V.M.
Gontar, A.G.
Dub, S.N.
さらに 6 件
掲載資料名:
Innovative superhard materials and sustainable coatings for advanced manufacturing
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:
200
発行年:
2005
開始ページ:
419
終了ページ:
428
総ページ数:
10
出版情報:
Dordrecht: Springer
ISBN:
9781402034695 [1402034695]
言語:
英語
請求記号:
N17050/200
資料種別:
国際会議録

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