Silicon-on-Insulator substrates with buried ground planes (GPSOI)
- 著者名:
Bain, M. Stefanos, S. Baine, P. Loh, S.H. Jin, M. Montgomery, J.H. Armstrong, B.M. Gamble, H.S. Hamel, J. McNeill, D. W. Kraft, M. Kemhadjian, H.A. - 掲載資料名:
- Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 185
- 発行年:
- 2005
- 開始ページ:
- 273
- 終了ページ:
- 278
- 総ページ数:
- 6
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402030116 [1402030118]
- 言語:
- 英語
- 請求記号:
- N17050/185
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
2
国際会議録
Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.
Kluwer Academic Publishers |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |