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DEPOSITION OF NANOSCALE MULTILAYERED STRUCTURES USING FILTERED CATHODIC VACUUM ARC PLASMA BEAMS

著者名:
Bilek, M.M.M.
McKenzie, D.R.
Oates, T.W.H.
Pigott, J.
Denniss, P.
Vlcek, J.
さらに 1 件
掲載資料名:
Emerging applications of vacuum-arc-produced plasma, ion and electron beams
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:
88
発行年:
2002
開始ページ:
173
終了ページ:
186
総ページ数:
14
出版情報:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402010651 [1402010656]
言語:
英語
請求記号:
N17050/88
資料種別:
国際会議録

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