PRODUCING OF GAS AND METAL ION BEAMS WITH VACUUM ARC ION SOURCES
- 著者名:
Bugaev, A.S. Gushenets, V.I. Nikolaev, A.G. Oks, E.M. Savkin, K.P. Schanin, P.M. Yushkov, G.Yu. Brown, I.G. - 掲載資料名:
- Emerging applications of vacuum-arc-produced plasma, ion and electron beams
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 88
- 発行年:
- 2002
- 開始ページ:
- 79
- 終了ページ:
- 90
- 総ページ数:
- 12
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402010651 [1402010656]
- 言語:
- 英語
- 請求記号:
- N17050/88
- 資料種別:
- 国際会議録
類似資料:
Kluwer Academic Publishers |
MRS - Materials Research Society |
2
国際会議録
New Developments in Metal Ion Implantation by Vacuum Arc Ion Sources and Metal Plasma Immersion
MRS - Materials Research Society |
Trans Tech Publications |
Kluwer Academic Publishers |
Kluwer Academic Publishers |
Kluwer Academic Publishers |
Kluwer Academic Publishers |
Kluwer Academic Publishers |
Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |