The Texture Effect on Diffusion Barrier Property on TiN Films between Copper and Si Wafer
- 著者名:
Sung, D. Y. Kim, I. Lee, M. G. Park, N. J. Yang, B. Yang, J. M. Ko, J. K. - 掲載資料名:
- Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 495-497(2)
- 発行年:
- 2005
- 開始ページ:
- 1371
- 終了ページ:
- 1376
- 総ページ数:
- 6
- 出版情報:
- Uetikon-Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499755 [087849975X]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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