High Al-Doping of SiC Using a Modified PVT (M-PVT) Growth Set-Up

High Al-Doping of SiC Using a Modified PVT (M-PVT) Growth Set-Up

著者名:

Muller, R.

掲載資料名:

Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy

シリーズ名:

Materials science forum

シリーズ巻号:

483-485

発行年:

2005

開始ページ:

31

終了ページ:

34

総ページ数:

4

出版情報:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499632 [0878499636]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014242
シリーズID:	PA00000012
会議名:	ECSCRM : European Conference on Silicon Carbide and Related Materials
回次:	2004 : 5th
会議開催地:	Bologna, Italy
会議開催年:	2004.08.31-2004.09.04

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1 国際会議録 Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions Wellmann, P. J., Straubinger, T. L., Desperrier, P., Muller, R., Kunecke, U., Sakwe, S. A., Schmitt, H., Winnacker, A., … Trans Tech Publications	7 国際会議録 Results of SIMS, LTPL and Temperature-Dependent Hall Effect Measurements Performed on Al-Doped α-SiC Substrates Grown by the M-PVT Method Contreras, S., Zielinski, M., Konczewicz, L., Blanc, C., Juillaguet, S., Muller, R., Kunecke, U., Wellmann, P.J., … Trans Tech Publications
2 国際会議録 Growth of Phosphorous-Doped n-Type 6H-SiC Crystals using a Modified PVT Technique and Phosphine as Source Desperrier, P., Mueller, R., Winnacker, A., Wellmann, P.J. Trans Tech Publications	8 国際会議録 Electrical and Optical Characterization of p-Type Boron-Doped 6H-SiC Bulk Crystals Bickermann, M., Weingartner, R., Herro, Z., Hofmann, D., Kunecke, U., Wellmann, P.J., Winnacker, A. Trans Tech Publications
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4 国際会議録 Aluminum Doping of 6H- and 4H-SiC with a Modified PVT Growth Method Straubinger, T.L., Bickermann, M., Rasp, M., Weingartner, R., Wellmann, P.J., Winnacker, A. Trans Tech Publications	10 国際会議録 Impact of Compensation on Optical Absorption Bands in the Below-Bandgap Region in n-Type (N) 6H-SiC Weingartner, R., Bickermann, M., Herro, Z., Kunecke, U., Sakwe, S.A., Wellmann, P.J., Winnacker, A. Trans Tech Publications
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