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Modeling and Analyzing on Nonuniformity of Material Removal in Chemical Mechanical Polishing of Silicon Wafer

著者名:
Su, J. X.
Guo, D. M.
Kang, R. K.
Jin, Z. J.
Li, X. J.
Tian, Y. B.
さらに 1 件
掲載資料名:
Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China
シリーズ名:
Materials science forum
シリーズ巻号:
471-472
発行年:
2004
開始ページ:
26
終了ページ:
31
総ページ数:
6
出版情報:
Zurich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499564 [0878499563]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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