High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing

High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing

著者名:

掲載資料名:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

シリーズ名:

Materials science forum

シリーズ巻号:

338-342(2)

発行年:

2000

開始ページ:

877

終了ページ:

880

総ページ数:

4

出版情報:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014227
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials : ICSCRM
回次:	1999
会議開催地:	Research Triangle Park, North Carolina, USA
会議開催年:	1999.10.10-1999.10.15

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2 国際会議録 Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS Wirth,H., Anwand,W., Brauer,G., Voelskow,M., Pankuin,D., Skorupa,W., Coleman,P.G. Trans Tech Publications	8 国際会議録 Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process Polychroniadis, E., Stoemenos, J., Ferro, G., Monteil, Y., Panknin, D., Skorupa, W. Trans Tech Publications
3 国際会議録 Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC Panknin, D., Gebel, T., Skorupa, W. Trans Tech Publications	9 国際会議録 Aluminum and Electron-Irradiation-Induced Deep Levels in n-Type and p-Type 6H-SiC Gong, M., Beling, C. D., Fung, S., Brauer, G., Wirth, H., Skorupa, W., You, Z-P. MRS - Materials Research Society
4 国際会議録 Characterization of Vacancy-Type Defects in Ion Implanted and Annealed SiC by Positron Annihilation Spectroscopy Anwand, W., Brauer, G., Coleman, P. G., Skorupa, W. MRS - Materials Research Society	10 国際会議録 Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing Panknin, D., Stoemenos, J., Eickhoff, M., Heera, V., Vouroutzis, N., Krotz, G., Skorupa, W. Trans Tech Publications
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6 国際会議録 Slow Positron Beam Investigations of Defects Caused by B+ Implantation into Epitaxial 6H-SiC Anwand, W., Brauer, G., Kuriplach, J., Skorupa, W. Trans Tech Publications	12 国際会議録 Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing Skorupa, W., Panknin, D., Voelskow, M., Anwand, W., Gebel, T., Yankov, R.A., Paul, Silke, Lerch, Wilfried Materials Research Society

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