SOL Thinning Effects on 3C-SiC on SOI

SOL Thinning Effects on 3C-SiC on SOI

著者名:

Planes, N.

掲載資料名:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

シリーズ名:

Materials science forum

シリーズ巻号:

338-342(1)

発行年:

2000

開始ページ:

301

終了ページ:

304

総ページ数:

4

出版情報:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014226
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials : ICSCRM
回次:	1999
会議開催地:	Research Triangle Park, North Carolina, USA
会議開催年:	1999.10.10-1999.10.15

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2 国際会議録 Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates Eickhoff, M., Zappe, S., Nielsen, A., Krotz, G., Obermeier, E., Vouroutzis, N., Stoemenos, J. Trans Tech Publications	8 国際会議録 Dependence of Wet Oxidation on the Defect Density in 3C-SiC Eickhoff, M., Vouroutzis, N., Nielsen, A., Kroetz, G., Stoemenos, J. Trans Tech Publications
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4 国際会議録 Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing Panknin, D., Stoemenos, J., Eickhoff, M., Heera, V., Vouroutzis, N., Krotz, G., Skorupa, W. Trans Tech Publications	10 国際会議録 Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers Ferro, G., Panknin, D., Stoemenos, J., Balloud, C., Camassel, J., Polychroniadis, E., Monteil, Y., Skorupa, W. Trans Tech Publications
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