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Volatile, Fluorine-Free β-Ketoiminate Precursors for MOCVD Growth of Lanthanide Oxide Thin Films

著者名:
Edleman, N.L.
Belot, J.A.
Babcock, J.R.
Metz, A.W.
Metz, M.V.
Stern, C.L.
Marks, T.J.
さらに 2 件
掲載資料名:
Materials science of novel oxide-based electronics : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
623
発行年:
2000
開始ページ:
371
終了ページ:
376
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995314 [1558995315]
言語:
英語
請求記号:
M23500/623
資料種別:
国際会議録

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