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In2O3 Based Multicomponent Oxide Transparent Conducting Films Prepared by R.F. Magnetron Sputtering

著者名:
掲載資料名:
Materials science of novel oxide-based electronics : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
623
発行年:
2000
開始ページ:
211
終了ページ:
222
総ページ数:
12
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995314 [1558995315]
言語:
英語
請求記号:
M23500/623
資料種別:
国際会議録

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