Silicon Field Emission Arrays Coated With CoSi2 Layer Grown by Reactive Chemical Vapor Deposition

Silicon Field Emission Arrays Coated With CoSi2 Layer Grown by Reactive Chemical Vapor Deposition

著者名:

掲載資料名:

Electron-emissive materials, vacuum microelectronics and flat-panel displsys : symposium held April 25-27 2000, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

621

発行年:

2001

開始ページ:

R5.1

出版情報:

Pittsburgh, PA.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995291 [1558995293]

言語:

英語

請求記号:

M23500/621

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014207
シリーズID:	PA00000011
会議名:	Symposium on electron-emissive materials, vacuum microelectronics and flat-panel displsys
回次:	2000
会議開催地:	San Francisco, CA, USA
会議開催年:	2000.04.25-2000.04.27

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