Increase Of Hydrogen-Radical Density And Improvement Of The Crystalline Volume Fraction Of Microcrystalline Silicon Films Prepared By Hot-Wire Assisted PECVD Method
- 著者名:
Harada, H. Inagaki, K. Inouchi, H. Itoh, T. Nitta, S. Nonomura, S. Yamamoto, K. Yamana, N. Yoshida, N. - 掲載資料名:
- Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 609
- 発行年:
- 2001
- 開始ページ:
- A19.3
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995178 [155899517X]
- 言語:
- 英語
- 請求記号:
- M23500/609
- 資料種別:
- 国際会議録
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1
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