In-Line Characterization Of Thin Poly silicon Films By Variable Angle Spectroscopic Ellipsometry
- 著者名:
Ferretti, R. Haase, J. Hohne, U. Kahler, J. D. Paprotta, S. Rover, K. S. - 掲載資料名:
- Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 609
- 発行年:
- 2001
- 開始ページ:
- A8.8
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995178 [155899517X]
- 言語:
- 英語
- 請求記号:
- M23500/609
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
10
国際会議録
Nanostructure of GdF3 thin film evaluated by variable angle spectroscopic ellipsometry [6321-09]
SPIE - The International Society of Optical Engineering |
Materials Research Society |
11
国際会議録
Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry
Trans Tech Publications |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |