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In-Situ Mass Spectroscopy Of ECR Silane Plasmas For Amorphous And Microcrystalline Silicon Growth

著者名:
掲載資料名:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
609
発行年:
2001
開始ページ:
A5.4
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
言語:
英語
請求記号:
M23500/609
資料種別:
国際会議録

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