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Low-Dielectric Constant SiCOH Films as Potential Candidates for Interconnect Dielectrics

著者名:
掲載資料名:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
565
発行年:
1999
開始ページ:
107
終了ページ:
116
総ページ数:
10
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994720 [1558994726]
言語:
英語
請求記号:
M23500/565
資料種別:
国際会議録

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