Characterization of Plated Cu Thin Film Microstructures

Characterization of Plated Cu Thin Film Microstructures

著者名:

Beyers, R. B.

掲載資料名:

Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

562

発行年:

1999

開始ページ:

209

終了ページ:

214

総ページ数:

6

出版情報:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558994690 [1558994696]

言語:

英語

請求記号:

M23500/562

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014190
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline metal and magnetic thin films
回次:	1999
会議開催地:	San Francisco, CA, USA
会議開催年:	1999.04.05-1999.04.08

類似資料:

1 国際会議録 Characterization of Plated Cu Thin Film Microstructures Gignac, L. M., Rodbell, K. P., Cabral, C., Jr., Andricacos, P. C., Rice, P. M., Beyers, R. B., Locke, P. S., Klepeis, S. … MRS - Materials Research Society	7 国際会議録 Film Crystallographic Texture and Substrate Surface Roughness in Layered Aluminum Metallization Rodbell, K. P., Svilan, V., Gignac, L. M., DeHaven, P. W., Murphy, R. J., Licata, T. J. MRS - Materials Research Society
2 国際会議録 Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films Cabral, C., Gignac, L., Harper, J. N. E., Hu, C. K., Noyan, I. C., ricacos, P. C., Rodbell, K. P. Materials Research Society	8 国際会議録 KINETICS OF INTERMETALLIC FORMATION IN FREE STANDING Cu/Mg MULTILAYER THIN FILMS Arcot, B., Clevenger, L. A., Murarkar, S. P., Harper, J. M. E., Cabral Jr., C. Materials Research Society
3 国際会議録 Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films Harper, J. M. E., Cabral, C., Jr., Andricacos, P. C., Gignac, L., Noyan, I. C., Rodbell, K. P., Hu, C. K. MRS - Materials Research Society	9 国際会議録 GRAIN GROWTH IN Al-(Cu, Pd, Nb) THIN FILMS Mis, J. D., Rodbell, K. P. MRS - Materials Research Society
4 国際会議録 Characterization of Thin Dielectric Films as Copper Diffusion Barriers Using Triangular Voltage Sweep Cohen, S. A., Liu, J., Gignac, L., Ivers, T., Armbrust, D., Rodbell, K. P., Gates, S. M. MRS - Materials Research Society	10 国際会議録 CORRELATION OF THE STRESS-TEMPERATURE HISTORY WITH MICROSTRUCTURE IN Al-0.5Cu AND Al-0.15Pd THIN FILMS Knorr, D. D., Rodbell, K. P. MRS - Materials Research Society
5 国際会議録 Characterization of Thin Dielectric Films as Copper Diffusion Barriers Using Triangular Voltage Sweep Armbrust, D., Cohen, S. A., Gates, S. M., Gignac, L., Ivers, T., Liu, J., Rodbell, K. P. Materials Research Society	11 国際会議録 THE EFFECT OF ANNEALING ON THE Cu DISTRIBUTION AND Al2Cu PRECIPITATION IN Al(Cu) THIN FILMS Colgan, E. G., Rodbell, K. P., Vigliotti, D. R. MRS - Materials Research Society
6 国際会議録 Dopants in Electroplated Copper Andricacos, P.C., Parks, C., Cabral, C., Wachnik, R., Tsai, R., Maihotra, S., Locke, P., Fluegel, J., Horkans, J., … Electrochemical Society	12 国際会議録 Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures Svilan, V., Rodbell, K. P., Clevenger, L. A., Cabral, C., Jr., Roy, R. A., Lavoie, C., Jordan-Sweet, J., Harper, J. M. … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12