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Dependence of Silicon Fracture Strength and Surface Morphology on Deep Reactive Ion Etching Parameters

著者名:
Chen, K-S.
Ayon, A.A.
Lohner, K.A.
Kepets, M.A.
Melconian, T.K.
Spearing, S.M.
さらに 1 件
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
546
発行年:
1999
開始ページ:
21
終了ページ:
26
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
言語:
英語
請求記号:
M23500/546
資料種別:
国際会議録

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