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Measurement of Stress in CVD Diamond Films

著者名:
掲載資料名:
Mechanical behavior of diamond and other forms of carbon : symposium held April 17-21, 1995, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
383
発行年:
1995
開始ページ:
135
終了ページ:
142
総ページ数:
8
出版情報:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9781558992863 [1558992863]
言語:
英語
請求記号:
M23500/383
資料種別:
国際会議録

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