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Diffusion of Implanted Be in AlxGa1-xAs as a Function of Al Concentration

著者名:
掲載資料名:
Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-34
発行年:
1994
開始ページ:
85
終了ページ:
95
総ページ数:
11
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770934 [1566770939]
言語:
英語
請求記号:
E23400/950719
資料種別:
国際会議録

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