Characterization of 2-Dimensional Dopant Profiles; Status and Review
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-33
- 発行年:
- 1994
- 開始ページ:
- 78
- 終了ページ:
- 97
- 総ページ数:
- 20
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770927 [1566770920]
- 言語:
- 英語
- 請求記号:
- E23400/951106
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling*
SPIE-The International Society for Optical Engineering |
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2
国際会議録
Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
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