Oscillation Behavior of Fe-Doping Profile and FeP Precipitation in Semi-Insulating Fe-Doped InP Grown by Metalorganic Chemical Vapor Deposition
- 著者名:
Chu, S.N.G. Logan, R.A. Ha, N.T. Nakahara, S. Karlicek, R.F., Jr. Grenko, J.A. - 掲載資料名:
- Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-18
- 発行年:
- 1994
- 開始ページ:
- 185
- 終了ページ:
- 194
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770750 [1566770750]
- 言語:
- 英語
- 請求記号:
- E23400/950354
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society | |
Electrochemical Society |
Materials Research Society |
Trans Tech Publications | |
Materials Research Society |
10
国際会議録
TEMPERATURE DEPENDENCE OF MORPHOLOGY OF InP FILMS GROWN BY METALORGANIC MOLECULAR BEAM EPITAXY
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |