HF Last Cleaning Before Silicon Epitaxy

HF Last Cleaning Before Silicon Epitaxy

著者名:

掲載資料名:

Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX)

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1994-18

発行年:

1994

開始ページ:

93

終了ページ:

100

総ページ数:

8

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770750 [1566770750]

言語:

英語

請求記号:

E23400/950354

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014127
シリーズID:	PA00000028
会議名:	Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices ; State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Meeting of the Electrochemical Society
回次:	1994 ; 20th ; 185th
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.05.22-1994.05.27

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2 国際会議録 OPTIMIZATION OF HF AND OXIDANT WET CLEANINGS BEFORE 7nm GATE OXIDE Tardif, F., Lardin, T., Paillet, C., Joly, J.P., Fleury, A., Patruno, P., Levy, D., Barla, K. Electrochemical Society	8 国際会議録 CHEMICAL OXIDE CHARACTERIZATION Paillet, C., Joly, J.P., Tardif, F., Barla, K., Patruno, P., Levy, D. Electrochemical Society
3 国際会議録 HF-LAST CLEANINGS: A STUDY OF THE PROPERTIES WITH RESPECT TO THE DIFFERENT VARIABLES Verhaverbeke, S., Bender, H., Meuris, M., Mertens, P. W., Schmidt, H. F., Heyns, M. M. MRS - Materials Research Society	9 国際会議録 PARTICLE IMPACT ON 7 nm GATE OXIDES Paillet, C., Papon, A.M., Joly, J.P., Tardif, F., Levy, D., Barla, K., Patruno, P. Electrochemical Society
4 国際会議録 IMPACT STUDY OF THE USE OF ULSI, VLSI AND MOS GRADE CHEMICALS IN THE RCA CLEANING PROCESS ON MOS AND BIPOLAR DEVICES Tardif, F., Joly, J.P., Lardin, T., Tonti, A., Patruno, P., Levy, D., Sievert, W. Electrochemical Society	10 国際会議録 EVALUATION OF ADVANCED PRE-GATE CLEANINGS Cowache, C., Boelen, P., Kashkoush, I., Besson, P., Tardif, F. Electrochemical Society
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6 国際会議録 The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning Higashi, G.S., Chabal, Y.J., Raghavachari, K., Becker, R.S., Green, M.P., Hanson, K., Boone, T., Eisenberg, J.H., Shive, … Electrochemical Society	12 国際会議録 MINERAL DIELECTRIC CLEANING DURING COPPER METALLIZATION PROCESSES Tardif, F., Beverina, A., Bernard, H., Constant, I., Robin, F., Torres, J. Electrochemical Society

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