Blank Cover Image

Point Defect Structure And Behavior As A Function Of Processing Parameters And P.M. Lenahan Composition In Silicon Oxynitride Films

著者名:
掲載資料名:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-16
発行年:
1994
開始ページ:
73
終了ページ:
82
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770484 [1566770483]
言語:
英語
請求記号:
E23400/942240
資料種別:
国際会議録

類似資料:

1 国際会議録 Atomic Scale Defects Involved in Stress Induced Leakage Currents in Very Thin Oxides on Silicon

Lenahan, P.M., Kang, A.Y., Campbell, J.P.

SPIE-The International Society for Optical Engineering
7 国際会議録 Compositionally Inhomogenous Silicon Oxynitride Dielectrics

Wager, J.F., Lim, S., Ryu, J.H., Marlia, J., Remley, K., Lite, K., Plant, T.K., Weisshaar, A., Casas, L.M.

Electrochemical Society
2 国際会議録 A Review of Electron Spin Resonance Spectroscopy of Defects in Thin Film SiO2 on Silicon

Conley, J., Lenahan, P.

Electrochemical Society
8 国際会議録 Interface Defects and Negative Bias Temperature Instabilities in 4H-SiC PMOSFETs - A Combined DCIV/SDR Study

T. Aichinger, P.M. Lenahan, D. Peters

Trans Tech Publications
3 国際会議録 ELECTRON SPIN RESONANCE STUDIES OF SILICON DIOXIDE FILMS ON SILICON IN INTEGRATED CIRCUITS USING SPIN DEPENDENT RECOMBINATION

Jupina, M.A., Lenahan, P.M.

Materials Research Society
9 国際会議録 A Surprising Result: “Bulk” SiC Defects in the Negative Bias Instability in 4H-SiC MOSFETs

M.A. Anders, P.M. Lenahan, A.J. Lelis

Trans Tech Publications
4 国際会議録 RELATIONSHIP BETWEEN STRAINED SILICON-OXYGEN BONDS AND RADIATION INDUCED PARAMAGNETIC POINT DEFECTS IN SILICON DIOXIDE

Warren, W. L., Lenahan, P. M., Brinker, C. J., Ashley, C. S.

Materials Research Society
10 国際会議録 PROCESS-INDUCED POINT DEFECTS IN OXIDEZ SILICON STRUCTURES

Caplan, P.J., Poindexter, E.H., Vasudev, P.K., Henderson, R.C.

Materials Research Society
5 国際会議録 Identification of Deep Level Defects in SiC Bipolar Junction Transistors

Lenahan, P.M., Pfeiffenberger, N.T., Pribicko, T.G., Lelis, A.J.

Trans Tech Publications
11 国際会議録 Effect of growth parameters on refractive index and film composition of plasma enhanced chemical vapor deposition silicon oxynitride films

Naskar, S., Bower, C. A., Yadon, L. N., Wolter, S. D., Stoner, B. R., Glass, J. T.

Materials Research Society
6 国際会議録 ELECTRICAL PROPERTIES OF METAL-OXIDE-SILICON STRUCTURES WITH SOL-GEL OXIDES

Warren, W.L., Lenahan, P.M., Brinker, C.J.

Materials Research Society
12 国際会議録 Thapping Centers in Borophosphosilicate and Phosphosilicate Thin Films on Silicon

Lenahan, P.M., Billman, C.A., Fuller, R., Lowry, R.K., Evans, H.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12