DISTRIBUTION OF AS-GROWN DEFECTS IN A SILICON SINGLE CRYSTAL

DISTRIBUTION OF AS-GROWN DEFECTS IN A SILICON SINGLE CRYSTAL

著者名:

掲載資料名:

Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1994-10

発行年:

1994

開始ページ:

168

終了ページ:

179

総ページ数:

12

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770422 [1566770424]

言語:

英語

請求記号:

E23400/941387

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014119
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	7th
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.05.23-1994.05.27

類似資料:

1 国際会議録 The Effect of COP on the Dielectric Breakdown Characteristics of Silicon MOS Capacitor Shiota, T., Morita, E., Furukawa, J., Furuya, H., Shingyouji, T., Shimanuki, Y. Electrochemical Society	7 国際会議録 The Impact of Furnace Graphite Parts on CZ-Grown Single Crystal Silicon's Radial Impurity Distribution Gilmore, D., Arahori, T., Ito, M., Murakami, H., Miki, S.-I. Electrochemical Society
2 国際会議録 Formation Behaviour of Grown-in Defects in Silicon During Czochralski Crystal Growth Saishoji, T., Nakamura, K., Nakajima, H., Yokoyama, T., Ishikawa, F., Tomioka, J. Electrochemical Society	8 国際会議録 Finite element analysis of the radial phosphorus dopant distribution in silicon Czochralski-grown single crystals Sugawara, K., Sugimoto, S., Nagashima, N., Fujioka, K., Mamada, Y., Igai, M., Hirayama, H. Electrochemical Society
3 国際会議録 Effect of Bulk Microdefects Induced in Silicon by Heat Treatment on the Leakage Current of pn Junctions Murakami, Y., Satou, Y., Furuya, H., Abe, H., Shingyouji, T. Electrochemical Society	9 国際会議録 The role of Oxygen Impurities in the Formation of Grown-in Laser Scattering Tomography Defects in Silicon Single Crystals Nishimura, M., Yamaguchi, Y., Nakamura, K., Jablonski, J., Watanabe, M. Electrochemical Society
4 国際会議録 Annealing Behavior of a Light Scattering Tomography Detected Defect near the Surface of Si Wafers Furukawa,J., Iwaoka,N., Furuya,H. Trans Tech Publications	10 国際会議録 The Dielectric Breakdown Characteristics of MOS Capacitor of Cz-Si Wafer Furukawa, J., Shiota, T., Kida, M., Shingyouji, T., Shimanuki, Y. Electrochemical Society
5 国際会議録 Effects of Growth Parameters on the Defects Formation in the Czochralski Grown Silicon Crystal Kim, Y., Ha, T.S., Yoon, J.K. Electrochemical Society	11 国際会議録 The Dielectric Breakdown Characteristics of MOS Capacitor of Cz-Si Wafer Furukawa,J., Shiota,T., Kida,M., Shingyouji,T., Shimanuki,Y. SPIE-The International Society for Optical Engineering
6 国際会議録 Defect Study of As-Grown Single Crystal ZnO by Positron J.Y. Ke, H. Li, J.B. Pang, Y.Q. Dai, Z. Wang Trans Tech Publications	12 国際会議録 Intrinsic Paramagnetic Defects in GaNP Alloys Grown on Silicon W. M. Chen, I. Vorona, I. Buaynova, A. Utsumi, Y. Furukawa, S. Moon, A. Wakahara, H. Yonezu Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12