SILICON FLOATING ZONE PROCESS: NUMERICAL MODELLING OF RF FIELD, HEAT TRANSFER, THERMAL STRESS AND EXPERIMENTAL PROOF FOR 4' CRYSTALS

SILICON FLOATING ZONE PROCESS: NUMERICAL MODELLING OF RF FIELD, HEAT TRANSFER, THERMAL STRESS AND EXPERIMENTAL PROOF FOR 4' CRYSTALS

著者名:

Riemann, H.

掲載資料名:

Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1994-10

発行年:

1994

開始ページ:

111

終了ページ:

123

総ページ数:

13

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770422 [1566770424]

言語:

英語

請求記号:

E23400/941387

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014119
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	7th
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.05.23-1994.05.27

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2 国際会議録 Growth of Floating Zone (FZ) Silicon Crystals Under the Influence of a Transversal Magnetic Field Riemann, H., Luedge, A., Hallmann, B., Turschner, T. Electrochemical Society	8 国際会議録 Radial Distributions of Transition Metal Defects in Float Zone Silicon Crystals Lemke,H., Zulehner,W., Hallmann,B. Electrochemical Society, SPIE-The International Society for Optical Engineering
3 国際会議録 Rotationless Floating Zone Crystal Growth A. Luedge, H. Riemann, B. Hallmann-Seffert, A. Muiznieks, F. Schuize Electrochemical Society	9 国際会議録 High-Speed Growth of FZ Silicon for Photovoltaics Luedge, A., Riemann, H., Hallmann, B., Wawra, H., Jensen, L., Larsen, T. L., Nielsen, A. Electrochemical Society
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5 国際会議録 In Situ Measurements of Local Temperature Fluctuations in the Melt of 4' FZ Silicon Crystal Growth in Comparison with Numerical Calculations Luedge, A., Riemann, H., Turschner, T., Muehlbauer, A., Muiznieks, A., Raming, G. Electrochemical Society	11 国際会議録 Radial Distributions of Transition Metal Defects in Float Zone Silicon Lemke, H., Zulehner, W., Hallmann, B. Electrochemical Society
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