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CONTROL OF NATiVE OXIDES ON DEEP-SUBMICRON CONTACT-HOLE-BOTTOM SURFACES

著者名:
Aoto, N.
Nakamori, M.
Hada, H.
Kunio, T.
Teraoka, Y.
Nishiyama, I.
Ikawa, E.
さらに 2 件
掲載資料名:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-7
発行年:
1994
開始ページ:
65
終了ページ:
69
総ページ数:
5
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
言語:
英語
請求記号:
E23400/941397
資料種別:
国際会議録

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