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Low-Temperature Deposition of ZrC Thin Films from a Single-Source Precursor

著者名:
掲載資料名:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-2
発行年:
1993
開始ページ:
417
終了ページ:
424
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
言語:
英語
請求記号:
E23400/930161
資料種別:
国際会議録

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