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Band Alignment Issues in Metal/Dielectric Stacks: A Combined Photoemission and Inverse Photoemission Study of the HfO2/Pt and HfO2/Hf Systems

著者名:
Sayan, S.
Bartynski, R.A.
Robertson, J.
Suehle, J.S.
Vogel, E.
Nguyen, N.V.
Ehrstein, J.
Kopanski, J.J.
Suzer, S.
Holl, M.B.
Garfunkel, E.
さらに 6 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-01
発行年:
2004
開始ページ:
255
終了ページ:
263
総ページ数:
9
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
言語:
英語
請求記号:
E23400/200401
資料種別:
国際会議録

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