SUB-NANOMETER HIGH -K GATE STACK SCALING USING THE HF-LAST/NH3 AKNEAL INTERFACE
- 著者名:
- 掲載資料名:
- Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-26
- 発行年:
- 2003
- 開始ページ:
- 93
- 終了ページ:
- 99
- 総ページ数:
- 7
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774116 [156677411X]
- 言語:
- 英語
- 請求記号:
- E23400/200326
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Electrochemical Society |
Materials Research Society |
8
国際会議録
Compare various pre-deposition treatments such as SC1, SC2, ozone, Hf- last, and NH3 annealing.
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |