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Impact of CMP Consumables on Copper Metallization Reliability

著者名:
Obeng, Y.  
掲載資料名:
Chemical Mechanical Planarization : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-21
発行年:
2003
開始ページ:
155
終了ページ:
164
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774048 [1566774047]
言語:
英語
請求記号:
E23400/200321
資料種別:
国際会議録

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