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Manufacture Processes for WSi2 GPSOI Substrates and Their Influence on Cross-Talk Suppression and Inductance

著者名:
Baine, P.
Gamble, H.
Armstrong, B.M
Bain, M.
McNeill, D.W.
Hamel, J.
Stefanos, S.
Kraft, M.
さらに 3 件
掲載資料名:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-19
発行年:
2003
開始ページ:
57
終了ページ:
63
総ページ数:
7
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774024 [1566774020]
言語:
英語
請求記号:
E23400/200319
資料種別:
国際会議録

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