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18 Excimer laser annealing: a solution for the future technology nodes?

著者名:
Privitera, V.
La Magna, A.
Mannino, G.
Fortunato, G.
Mariucci, L.
Svensson, B. C.
さらに 1 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-14
発行年:
2003
開始ページ:
137
終了ページ:
144
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
言語:
英語
請求記号:
E23400/200314
資料種別:
国際会議録

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