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HfO2 Films Obtained By Injection MOCVD

著者名:
Leedham, T.J.
Davies, H.O.
Jones, A.C.
O'Sullivan, B.J.
Mondreau, M.
Hurley, P.K.
Fang, Q.
Boyd, I.W.
さらに 3 件
掲載資料名:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-8
発行年:
2003
開始ページ:
907
終了ページ:
914
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
言語:
英語
請求記号:
E23400/200308
資料種別:
国際会議録

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