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Optimization of Ultra-Thin Body, Fully-Depleted-SOI Device, with Raised Source/Drain or Raised Extension

著者名:
Egley, J.L.
Vandooren, A.
Winstead, B.
Verret, E.
White, B.
Nguyen, B.-Y.
さらに 1 件
掲載資料名:
ULSI Process Integration : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-6
発行年:
2003
開始ページ:
572
終了ページ:
577
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
言語:
英語
請求記号:
E23400/200306
資料種別:
国際会議録

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