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Fully Depleted SOI Process and Device Technology for Digital and RF Applications*

著者名:
Ichikawa, F.
Nagatomo, V.
Katakura, V.
Itoh, S.
Matsuhashi, H.
Hirashita, N.
Baba, S.
さらに 2 件
掲載資料名:
ULSI Process Integration : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-6
発行年:
2003
開始ページ:
546
終了ページ:
555
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
言語:
英語
請求記号:
E23400/200306
資料種別:
国際会議録

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