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Si Channel Surface Dependence of Electrical Characteristics in Ultra-Thin Gate Oxide CMOS*

著者名:
Momose, H.S.  
掲載資料名:
ULSI Process Integration : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-6
発行年:
2003
開始ページ:
361
終了ページ:
374
総ページ数:
14
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
言語:
英語
請求記号:
E23400/200306
資料種別:
国際会議録

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