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Analysis of HALO implant influence on the self-heating and self-heating enhanced impact ionization on 0.13 μm floating-body partially-depleted SOI MOSFET at low temperature

著者名:
Pavanello, M.A.
Martino, J.A.
Simoen, E.
Mercha, A.
Clacys, C.
van Meer, H.
De Meyer, K.
さらに 2 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
389
終了ページ:
394
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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