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Extremely scaled FinFETs and ultra-thin bod SOI CMOS Devices

著者名:
Balasubrarnanian, S.
Chang, L.
Choi, Y.-K.
Ha, D.
Lee, J.
Ranade, P.
Xiong, S.
Bokor, J.
Hu, C.
King, T.-J.
さらに 5 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
197
終了ページ:
208
総ページ数:
12
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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