Electrical Characterization Techniques for Semiconductor-Silicon Dioxide Interface - A Review
- 著者名:
- Deen, M.J.
- 掲載資料名:
- Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-2
- 発行年:
- 2003
- 開始ページ:
- 3
- 終了ページ:
- 21
- 総ページ数:
- 19
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773478 [1566773474]
- 言語:
- 英語
- 請求記号:
- E23400/200302
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
7
国際会議録
ELECTRICAL CHARACTERIZATION OF THE OXIDE-SILICON CARBIDE INTERFACE BY MOS CONDUCTANCE TECHNIQUE
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
MRS-Materials Research Society |
5
国際会議録
ELECTRICAL BEHAVIOR OF SPIN-ON SILICON DIOXIDE (SOX) IN A METAL-OXIDE-SEMICONDUCTOR STRUCTURE
Materials Research Society |
Materials Research Society |
6
国際会議録
Characterization of the Silicon Dioxide - Silicon Interface with the Scanning Capacitance Microscope
Electrochemical Society |
Electrochemical Society |