Optical MEMS devices based on wet anisotropic etching of silicon

Optical MEMS devices based on wet anisotropic etching of silicon

著者名:

Hoffmann, M. ( (Universitaet Dortmund) )
Niisse, D. ( (Universitaet Dortmund) )
Voges, E. ( (Universitaet Dortmund) )

掲載資料名:

Dielectrics in emerging technologies : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2003-1

発行年:

2003

開始ページ:

160

終了ページ:

171

総ページ数:

12

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773461 [1566773466]

言語:

英語

請求記号:

E23400/200301

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014064
シリーズID:	PA00000028
会議名:	International Symposium on Science and Technology of Dielectrics in Emerging Fields
回次:	1st
会議開催地:	Paris, France
会議開催年:	2003.04.27-2003.05.02

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