Fabrication of 3-D Structure on P-Type Silicon Using Electrochemical Etching
- 著者名:
Izuo, S. Saitoh, F. Obji, H. Fukami, T. French, P.J. Tsutsumi, K. - 掲載資料名:
- High purity silicon VII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2002-20
- 発行年:
- 2002
- 開始ページ:
- 387
- 終了ページ:
- 396
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773447 [156677344X]
- 言語:
- 英語
- 請求記号:
- E23400/200220
- 資料種別:
- 国際会議録
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