Post Oxide Etching Cleaning Process Using Integrated Ashing and HF Vapor Process
- 著者名:
- 掲載資料名:
- Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2002-15
- 発行年:
- 2002
- 開始ページ:
- 166
- 終了ページ:
- 179
- 総ページ数:
- 14
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773379 [1566773377]
- 言語:
- 英語
- 請求記号:
- E23400/200215
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
MRS-Materials Research Society |
American Institute of Chemical Engineers |
8
国際会議録
Characterization of Oxide Etching and Wafer Cleaning Using Vapor-Phase Anhydrous HF and Ozone
MRS - Materials Research Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |